Chemical Sensor Technology Volume 4
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Contents:
- Development of the TGS Gas Sensor (A. Chiba). Invention of the Gas Sensor. Establishment of Figaro Engineering Inc. Some Basic Aspects of Semiconductor Gas Sensors (N. Yamazoe and N. Miura). Microstructure of SnO2?Create Particles. Influence of Microstructure on Gas Sensitivity.
- Modifications of SnO2?Create Surface. Concluding Remarks. Silicon Technologies for Sensor Fabrication (W. Mokwa). Basic Processing Steps. Silicon on Insulator Technology. Silicon Micromechanics. Thin Film Chemical Sensors on Silicon Substrates. Chemical Sensors Based on Silicon Devices. Micromachined Chemical Sensors. Conclusion. Characterization of Oxygen Adsorbates on Semiconductive Oxides (M. Iwamoto). Oxygen Species Adsorbed
- on Oxides. Adsorption States of Oxygen Species on Oxides. Reactivity of Oxygen Species Adsorbed on Metal Oxides. Conclusions. Miniaturization of Catalytic Combustion Sensors (H. Futata). Conventional Catalytic Combustion
Chemical Sensor Technology Volume 4
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